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CVD / PECVD Coating

Friday, 01 October 2010 11:57

Written by Admin

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OTF-1200X-80-HVC2 is a CE certified 80mm OD (3"ID) single zone split tube furnace with high vacuum pump system (mechanical pump + molecular pump up to 10-5 torr) and two channels gas mixing system, which can achieve mix two type of gases for CVD or diffusion.

 

 

 

 

Specifications:

 

 Furnace casing

 

Double layer steel casing with air cooling. Built in thermostat to control Cooling running automatically when case > 55oC.

 Power

 KW

 2.5

 Voltage

 V

 AC 208-240V Single Phase, 50/60 Hz

Heating Element

 

Fe-Cr-Al Alloy doped by Mo

 Max. Temperature

 oC

 1200

 Continuous Temperature

 oC

 1100

 Max. Heating Rate

 oC /min

 <= 20

 Tube Size and Materials

 mm

 OD:80;  ID: 75;  Length: 1000, Quartz tube (included)

 Heating Zone length

 mm

  440 (single zone)

Constant temperature zone

  mm

  150  (+/-1oC)

 Temperature controller

 

PID automatic control via current limiting phase angle fired the resistor with 51 steps programmable

 Temperature Accuracy

  oC

 +/- 1

 Vacuum Seal

 

 Two stainless steel flanges with vacuum gauge and valves

Vacuum pumps

 

Tow stages vacuum pump installed in bottom case:

  • One Double Steps Rotary Vane High Speed Mechanical Vacuum Pump- T2XZ-4C110with max. vacuum pressure of 10-2 torr.  
  • One turbo molecular pump with max. vacuum pressure of 2x10-5 torr. 
  • One precision vacuum sensor installed. 
  • Stainless steel hose tube is included for connecting to tube furnace.
  • Digital vacuum meter / controller installed.
  • Please click here to review : How to operate High vacuum system.

Vacuum Sensor & display

 

Vacuum sensor is installed to vacuum flange on tube furnace, and connect to a digital vacuum pressure display which is installed in bottom mobile case

Gas flow meter and pressure meter

 
  • 2 precision mass flow meters (CS200) controllers are installed in bottom mobile cart with digital display panel of +/-1% of full scale  (accuracy is within 35% - 100% of full scale)
    • 1 MFC at range 0 - 1000scc
    • 1 MFC at range 0 - 200scc
  • One mechanical pressure meters are installed in bottom mobile cart for monitor each gas 's pressure in mixer.
  • 2 mass flow MFC control panels/displays with dial button to adjust gas flow rate. Please see picture below.
  • Click to download User Manual

 

Valves & Flanges

 

  • Four stainless steel ball valves are installed in side panel of mobile case to control, vacuum pump, mixing gases and two inlet gases separately.
  • Vacuum sensor is installed to vacuum flange on tube furnace, and connect to a digital vacuum pressure display
  • Vacuum controller and display are installed in bottom mobile cart

 Dimension

 mm

 Furnace: 550 x 380 x 520  Bottom Mobile case: 600x600x597

 Net Weight

 Kg

 about 60

Shipping weight

 lbs

 200

Shipping package size after crating

 inch

 Two cases in one pallet:  45x45x35/case

 Warranty & Certificate

 

  •  One year limited, not including quartz tube.
  • CE certified 

Notice:

( click underlined to see detail)

 
  • Please click here to see our typical temperature profile calibration result at various temperature.
  • In order to obtain accurate temperature inside tube furnace, you need to calibrate temperature by yourselves. Please click here to learn how.
  • How to set up ceramic tube and vacuum flange for MTI Tube furnace.