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Plasma Sputting / Evaporating Coaters

Friday, 01 October 2010 12:24

Written by Admin

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 GSL-1100X-SPC12  is CE certified  compact plasma sputtering coater  and designed for making metallic coatings, such as gold, platinum, Indium and silver etc, on a sample up to 40 mm diameter with 300 Angstrom thickness. Especially for coating conductive gold film for SEM sample. The plasma sputtering coater is shipped with all necessary accessories for immediate use, including one pre-installed gold sputtering target, Vacuum pump, stainless steel bellows with KFD25 adapter & clamps and vapor trap.

 

MAIN SPECIFICATIONS

Input Power

208V - 240V, 50/60 Hz, < 1500W ( including pump)

Specimen chamber:

Fused glass tube, 100 mm Dia. x 130mm Height

Specimen stage

40 Dia. (Can coating 6 SEM sample on one stage, height is adjustable)

Accessories included (Please click the picture below for details)

 
  • Vane rotary vacuum pump 1L/S (external ) with Pirani gauge
  • Vapor trap prevent back streaming of oil into the vacuum chamber
  • Stainless steel bellows with KFD-25 adapter and clamps
  • High purity gold foil target
  • the system requires a Ar gas tank with pressure regulator  which is not included.

 Gas atmosphere

 One needle valve installed to allow Ar has inlet to achieve better plasma coating

Target size

·         4N purity Gold foil:  57 mm dia. x 0.12 mm  (Included and pre-installed on coater )

·         Optional Au target  (57mm dia.x0.12mm, 4N)  available at $795/ea

·         Optional Pt target (57mm dia.x0.12mm, 4N)  available at $1590/ea

·         Optional Ag target (57mm dia.x0.5mm, 4N)  available at $ 295/ea

Overall dimension

L480mmx W320mm x H150mm

 Net Weight

 20 kg

Warranty & Certificate
  • One year
  • CE certified